GWSPS Oil free Scroll Vacuum Pump
GWSPS series oil free scroll vacuum pump, also refer to as vortex pump, dry scroll pump, oil free scroll pump, oilless scroll pump, dry scroll vacuum pump, oil free vortex vacuum pump is perfectly used in semiconductor industry, photoelectric, materials, medical, energy, aerospace, analyzing instruments and vacuum systems, with the advantages of compact structure, small size, light weight and low vibration, low noise, low energy consumption, suitable for global power supply, one button start, can be frequently started and stop between atmospheric pressure and vacuum.
GEOWELL is a professional manufacturer of scroll vacuum pumps with over 22 years of field experience, the longest performance hours and the largest sales in China, GEOWELL's GWSPS series scroll vacuum pumps are the premium choice for clean pumping technology.
GEOWELL is a professional manufacturer of scroll vacuum pumps with over 22 years of field experience, the longest performance hours and the largest sales in China, GEOWELL's GWSPS series scroll vacuum pumps are the premium choice for clean pumping technology.
Specifications
Operating principle Applications Performance curves Dimensions
Safety Precautions
Be sure the inlet gas temperature must be less than 122℉.
GWSPS oil free scroll vacuum pump is constructed with pump head assembly, crank pin assembly, bracket assembly, air flush assembly, and exhaust valve assembly. Two spiral cylinders, one offset and orbiting against the other fixed with an offset of 180° to form several crescent-shaped pockets of differing sizes. By means of an eccentric drive, the orbiting scroll is made to orbit about the fixed scroll, reducing the volume of the pockets and compressing gas from outside towards the inside thereby pumping the gas from vacuum chamber.
Features and Benefits
100% no oil clean vacuum
No oil back-diffusion, no oil mist exhaust, provide clean vacuum environment
Wide product lineup
Pumping speed covers 4~50m3/h, limited vacuum level 15~200 Pa
Suitable for all type of power supply around the world
110/220/380/460v, 50/60Hz for choose
Low vibration, low noise
57~67 dB(A), smooth operation
High efficiency, ease of maintenance
No water cooled, no oil lubricated, no daily maintenance
Applications
Semiconductor industry
Vacuum sputtering machine.
IC plasma cleaning machine.
IC plasma polishing machine.
IC packaging machine.
IC transmission chamber.
Photoelectric industry
LED vacuum annealing furnace.
Load lock/transfer chambers.
Glove box.
LED packaging machine.
Liquid crystal injection and packaging.
Material industry
Vacuum annealing furnace.
Vacuum diffusion oven.
3D metal printing.
Single crystal growth furnace.
Microwave cleaning and microwave drying machine.
E-beam/Laser melting.
Vacuum degassing. Vacuum gas substitution.
Food and drug industry
Freezing dry. Vacuum storage.
Medical equipment
Low temperature plasma sterilizer.
Vacuum storage.
Dental equipment.
Energy industry
SF 6 Gas recovery machine.
Lithium battery drying and packaging machine.
Analyzing instrument and device
Spectroscopy/scanning electron microscopy
Space environment simulation machine
Helium Leak detector
Mass spectrometer
Cryopump regeneration
Accelerators / synchrotrons
Vacuum equipment
Oil free ultrahigh vacuum unit
Oil free vacuum unit
Previous:
Next:
Nothing
Product information
- Product serial number
- Thumbnail
- Name of product
Contact information
Basic information
Search
About Geowell
Products
Solution
Contact
Add: No. 99A-18, Chuangxin 1st Road, Hunnan District, Shenyang, China 110169
Tel：+86-24-83685362
Mob：+86-13644904879
Fax：+86-24-23783066
Email： export@geowell.com.cn
Copyright © 2021 Geowell
Liao ICP No. 06016259
