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 GWSPS
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump
 GWSPS Oil free Scroll Vacuum Pump

GWSPS Oil free Scroll Vacuum Pump

GWSPS series oil free scroll vacuum pump, also refer to as vortex pump, dry scroll pump, oil free scroll pump, oilless scroll pump, dry scroll vacuum pump, oil free vortex vacuum pump is perfectly used in semiconductor industry, photoelectric, materials, medical, energy, aerospace, analyzing instruments and vacuum systems, with the advantages of compact structure, small size, light weight and low vibration, low noise, low energy consumption, suitable for global power supply, one button start, can be frequently started and stop between atmospheric pressure and vacuum.
GEOWELL is a professional manufacturer of scroll vacuum pumps with over 20 years of field experience, the longest performance hours and the largest sales in China, GEOWELL's GWSPS series scroll vacuum pumps are the premium choice for clean pumping technology.
Specifications Operating principle Applications Performance curves Dimensions

Model

GWSPS75

GWSPS150

GWSPS300

GWSPS500

GWSPS900

Pumping Speed

50Hz

l/s

1.0

2.6

4.4

6.7

11.6

l/min

60.0

156.0

264.0

402.0

693.0

m3/h

3.6

9.4

15.8

24.0

41.6

cfm

2.2

5.7

8.8

14.7

24.6

60Hz

l/s

1.2

3.1

5.3

8.1

13.9

l/min

72.0

187.0

317.0

482.0

831.6

m3/h

4.2

11.1

18.9

28.8

50.0

cfm

2.4

6.8

10.6

17.6

30.0

Ultimate Pressure

Pa

≤15

≤10

≤8

≤5

≤200

mbar

≤1.5*10-1

≤1.0*10-1

≤8.0*10-2

≤5.0*10-2

≤2.0

Torr

≤1.1*10-1

≤7.5*10-2

≤6.0*10-2

≤3.7*10-2

≤1.5

psi

≤2.2*10-3

≤1.5*10-3

≤1.2*10-3

≤7.5*10-4

≤2.9*10-2

Noise Level

dB(A)

≤61

Leakage

Pa·l/s

1*10-7

Max. Inlet/Exhaust Pressure

MPa

0.1 / 0.13

Ambient Operation Temp.

41~104

Cooling Type

 

Air cooled

Inlet/Exhaust Flange

 

KF25/KF16

KF40/KF16

Motor 1 phase

Power

kW

0.55

0.55

0.55

---

---

Voltage

V

110~115 (60Hz),200~230 (50Hz)

---

---

Speed

rpm

1425 (50Hz),1725 (60Hz)

---

---

Plug

 

North America, Europe, UK/Ireland, India

---

---

Motor 3 phase

Power

kW

0.55

0.55

0.55

0.75

1.5

Voltage

V

200~230 or 380~415 (50Hz), 200~230 or 460 (60Hz)

Speed

rpm

1425 (50Hz),1725 (60Hz)

Dimensions

1 phase

mm

505*265*275

510*265*275

535*320*305

---

---

3 phase

mm

505*265*275

510*265*275

535*320*305

590*320*345

590*320*345

Net Weight

1 phase

kg

21

22

32

---

---

3 phase

kg

20

21

27

38

41

 

Safety Precautions

Be sure the inlet gas temperature must be less than 122℉.

GWSPS oil free scroll vacuum pump is constructed with pump head assembly, crank pin assembly, bracket assembly, air flush assembly, and exhaust valve assembly. Two spiral cylinders, one offset and orbiting against the other fixed with an offset of 180° to form several crescent-shaped pockets of differing sizes. By means of an eccentric drive, the orbiting scroll is made to orbit about the fixed scroll, reducing the volume of the pockets and compressing gas from outside towards the inside thereby pumping the gas from vacuum chamber.

Features and Benefits

100% no oil clean vacuum

No oil back-diffusion, no oil mist exhaust, provide clean vacuum environment  

Wide product lineup

Pumping speed covers3~60m3/h, limited vacuum level 1~8 Pa

Suitable for all type of power supply around the world

110/220/380/460v, 50/60Hz for choose

Low vibration, low noise

57~63 dB(A), smooth operation

High efficiency, ease of maintenance

No water cooled, no oil lubricated, no daily maintenance

 

Applications

Semiconductor industry

Vacuum sputtering machine.

IC plasma cleaning machine.

IC plasma polishing machine.

IC packaging machine.

IC transmission chamber.

Photoelectric industry

LED vacuum annealing furnace.

Load lock/transfer chambers.

Glove box.

LED packaging machine.

Liquid crystal injection and packaging.

Material industry

Vacuum annealing furnace.

Vacuum diffusion oven.

3D metal printing.

Single crystal growth furnace.

Microwave cleaning and microwave drying machine.

E-beam/Laser melting.

Vacuum degassing. Vacuum gas substitution.

Food and drug industry

Freezing dry. Vacuum storage.

Medical equipment

Low temperature plasma sterilizer.

Vacuum storage.

Dental equipment.

Energy industry

SF 6 Gas recovery machine.

Lithium battery drying and packaging machine.

Analyzing instrument and device

Spectroscopy/scanning electron microscopy

Space environment simulation machine

Helium Leak detector

Mass spectrometer

Cryopump regeneration

Accelerators / synchrotrons

Vacuum equipment

Oil free ultrahigh vacuum unit

Oil free vacuum unit

    

 

A

B

C

D

E

F

G

H

K

L

M

N

d1

d2

GWSPS75

505

265

275

225

215

120

125

160

80

65

200

250

KF25

KF16

GWSPS150

510

265

275

225

215

120

135

145

80

70

155

250

KF25

KF16

GWSPS300

535

320

305

255

230

160

140

165

95

85

200

270

KF25

KF16

GWSPS500

590

320

345

300

250

165

125

190

135

85

205

290

KF40

KF16

GWSPS900

590

320

345

300

250

165

125

190

135

85

205

290

KF40

KF16

                                    

   

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Product information

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Name of product
Product serial number: GWSPS系列
GWSPS Oil free Scroll Vacuum Pump
GWSPS Oil free Scroll Vacuum Pump

Contact information

Basic information

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Online Time:09:30-05:30

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