IC plasma cleaning machine

GWSP and GWSPS series oil free scroll vacuum pumps are used in plasma cleaning system to provide clean vacuum environment for cleaning, activation and reduction of electronic devices / integrated circuits, pretreatment of bonding and bonding, cleaning and disinfection of medical operation mosaic parts and supports, etc.

IC plasma polishing machine

GWSP oil free scroll vacuum pumps and GWMS series oil free ultra-high vacuum units are used in plasma polishing system to provide oil free clean vacuum enviornment to ensure the polishing machine's clean vacuum environment to chemically activate the workpiece surface, remove the surface molecular pollution layer, and cross link the surface with chemicals.

Magnetron sputtering machine

GEOWELL oil free scroll vacuum pumps are widely used in magnetron sputtering system to provide a clean vacuum environment. It can greatly improve the pass rate of products and create better economic benefits. GWSP, GWSPS oil free scroll vacuum pumps and GWMS oil free ultra-high vacuum units are applied to various industry equipment and scientific research respectively.

IC packaging machine

GWSP and GWSPS series oil free scroll vacuum pumps are used in IC packaging systems to realize the connection between internal chip and external circuit in clean vacuum environment to prevent the corrosion of the chip circuit by impurities in the air, to increase of electrical performance.